Fabrication process of flex-to-rigid structuresTo form flex-to-rigid (FTR) structures, the double-sided polishing (DSP) silicon substrate (Unisill Co., Korea) was used...
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Fabrication process of flex-to-rigid structuresTo form flex-to-rigid (FTR) structures, the double-sided polishing (DSP) silicon substrate (Unisill Co., Korea) was used...
